Mirror-grinding of single-crystal diamond substrates with ...
2022-1-1 · Because the grinding rate along the hard direction was too low, soft and rotary grinding were only studied. Fig. 9 summarizes the grinding rate as a function of the average abrasive size. The grinding rates for soft grinding were 0.19, 0.11, 0.09, and 0.05 μm/min for #600, #2500, #10000, and #15000 grinding wheels, respectively.