Grinding wheels for manufacturing of silicon wafers: A ...
2006-10-11 · A grinding wheel (more specifically, the rim, or the abrasive segments, of the grinding wheel) consists of abrasive grains (a.k.a. abrasive grits), bond material, and pores, as shown in Fig. 5 [18]. Grinding wheels can be manufactured in a variety of grades or structures deter-mined by the relative volume percentage of abrasive grains,