GRINDING WHEEL TRUING TOOL AND MANUFACTURING
During wafer edge grinding, the round fine-grinding wheel 34 is rotated at a high speed, for example, at a linear velocity of about 5000 m/min (about 30000 rpm to 40000 rpm), and the notch fine-grinding wheel 32 is rotated at a high speed, for example, at a linear velocity of about 500 m/min (about 150000 rpm). At this time, a friction heat is ...
